Description: AE ADVANCED ENERGY APEX 1513 RF GENERATOR 3156110-114 LAM 660-032596-014 KIYO ETCH 1.5kW 13.56MHz 374V POWER-DELIVERY SYSTEM Product SpecificationsAdvanced Energy Apex® RF Power-Delivery Systems The Apex platform delivers superb performance in plasma-based thin film processes for semiconductor, flat panel display, or data storage manufacturing. The versatile Apex® family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing. Features:Streamlined designOn-board chamber mount, on-tool frame mount, rack mount, and shoebox optionsWideband control loops and optional, high repetition-rate pulsingIndustry-leading arc managementRegulatory compliantBenefits:Higher power densityImproved process flexibilityIncreased yieldLower CoOSimplified process tool integrationFlexible communications Unit SpecificationsMake: Advanced Energy (AE)Model: Apex 1513AE Part No.: 3156110-114LAM Part No.: 660-032596-014Rev: B, F/R: B1.5kW, 13.56MHz, 374VType: RF Generator/ RF Power-Delivery System DescriptionThis unit is used, untested and in good physical condition (with few minor scratches/scuffs from handling). As we do not have the technical expertise to further test the unit, we are selling it on an "AS IS BASIS". ShippingWe ship worldwide. Please email us for a shipping quoteGot a minute? Check out more LAM Research parts and RF related parts/ equipment My Store | Contact Us
Price: 2299 USD
Location: Singapore, none
End Time: 2024-10-16T07:57:30.000Z
Shipping Cost: 0 USD
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All returns accepted: ReturnsNotAccepted
Brand: Advanced Energy AE/ LAM Research
Model: Apex 1513/ 3156110-114 B/ 660-032596-014
MPN: Apex 1513/ 3156110-114 B/ 660-032596-014
Type: RF Generator/ RF Power-Delivery System
